Charged species profiles in oxygen plasma

Applied Physics Letters

Volumn 77, Issue 6, 2000, Pages 800-802

  Berezhnoj, S V ^a   Shin, C B ^a   Buddemeier, U ^b   Kaganovich, I ^b  

^a Ajou University   (South Korea)

^b RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001080060     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1306637     Document Type: Article

References (17)

1. W. Swider, Ionospheric Modeling (Birkhauser, Basel, 1988).
2. M. Hopkins and K. Mellon, Phys. Rev. Lett. 67, 449 (1991).
3. M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 1994).
4. I. D. Kaganovich and L. D. Tsendin, Plasma Phys. Rep. 19, 645 (1993).
5. I. Kaganovich, D. J. Economou, B. N. Ramamurthi, and V. Midha, Phys. Rev. Lett. 84, 1918 (2000).
6. L. D. Tsendin, Sov. Phys. Tech. Phys. 34, 11 (1989).
7. D. Vender, W. W. Stoffels, E. Stoffels, G. M. W. Kroesen, and F. G. de Hoog, Phys. Rev. E 51, 2425 (1995).
8. U. Buddemeier, Ph.D. thesis, Ruhr Universitaet (1997).
9. V. Godyak and R. Piejak, Plasma Sources Sci. Technol. 1, 36 (1992).
10. M. Bacal, Plasma Sources Sci. Technol. 2, 493 (1993).
11. Yu. M. Kagan and V. I. Perel, Usp. Fiz. Nauk 81, 1055 (1978).
12. S. V. Berezhnoi, I. D. Kaganovich, and L. D. Tsendin, Plasma Sources Sci. Technol. 7, 268 (1998).
13. E. W. McDaniel and E. A. Mason, The Mobility and Diffusion of Ions in Gases (Wiley, New York, 1973).
14. I. A. Kossyj, A. Yu. Kostinsky, A. A. Matveev, and V. P. Silakov, Plasma Sources Sci. Technol. 1, 207 (1992).
15. R. L. Sharpless and T. G. Slanger, J. Chem. Phys. 91, 7947 (1989).
16. A. J. Lichtenberg, V. Vahedi, M. A. Lieberman, and T. Ronglien, J. Appl. Phys. 75, 2339 (1994).
17. A. J. Lichtenberg, I. Kouznetsov, Y. T. Lee, M. A. Lieberman, I. D. Kaganovich, and L. D. Tsendin, Plasma Sources Sci. Technol. 6, 437 (1997).