Transport issues in focused electron beam chemical vapor deposition

Surface and Coatings Technology

Volumn 201, Issue 22-23 SPEC. ISS., 2007, Pages 8808-8812

  Fedorov, Andrei G ^a   Rykaczewski, Konrad ^a   White, William B ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Electron beam CVD; Heat and mass transfer

Indexed keywords

BOLTZMANN EQUATION; ELECTRON BEAMS; ENERGY TRANSFER; HEAT CONDUCTION; HEAT TRANSFER; MASS TRANSFER; SUBSTRATES; SURFACE DIFFUSION;

BOLTZMAN TRANSPORT EQUATION (BTE); FOCUSED ELECTRON BEAM CHEMICAL VAPOR DEPOSITION; HIGH-ENERGY PRIMARY ELECTRON BEAM;

CHEMICAL VAPOR DEPOSITION;

BOLTZMANN EQUATION; CHEMICAL VAPOR DEPOSITION; ELECTRON BEAMS; ENERGY TRANSFER; HEAT CONDUCTION; HEAT TRANSFER; MASS TRANSFER; SUBSTRATES; SURFACE DIFFUSION;

EID: 34547689751     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.04.031     Document Type: Article

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