Poly(vinyl alcohol) as a structure release layer for the microfabrication of polymer composite structures

Journal of Micromechanics and Microengineering

Volumn 17, Issue 7, 2007, Pages

  Addae Mensah, Kweku A ^a   Reiserer, Ronald S ^b   Wikswo, John P ^a,b,c  

^a VANDERBILT UNIVERSITY   (United States)

^b VANDERBILT UNIVERSITY   (United States)

^c VANDERBILT UNIVERSITY SCHOOL OF MEDICINE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHY; MEMS; MICROELECTROMECHANICAL DEVICES; POLYDIMETHYLSILOXANE;

BIOMEMS; BIOMEMS MICROFABRICATION; POLYMER COMPOSITE STRUCTURES; SOFT LITHOGRAPHY;

POLYVINYL ALCOHOLS;

EID: 34547610613     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/7/N01     Document Type: Article

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