Water-soluble sacrificial layers for surface micromachining

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Volumn 1, Issue 7, 2005, Pages 730-736

  Linder, Vincent ^a   Gates, Byron D ^a   Ryan, Declan ^a   Parviz, Babak A ^a   Whitesides, George M ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

Microelectromechanical systems; Polymers; Sacrificial layers; Spin coating; Surface micromachining

Indexed keywords

CARBOXYLIC ACIDS; DISSOLUTION; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; ORGANIC POLYMERS; PHOTOLITHOGRAPHY; SPIN COATING;

METALLIC STRUCTURES; MICROELECTROMECHANICAL SYSTEMS; SACRIFICIAL LAYERS; SURFACE MICROMACHINING;

MICROMACHINING;

ACRYLIC ACID RESIN; CALCIUM; CARBOPOL 940; DEXTRAN; ION; NICKEL; OXIDE; POLYMER; SOLVENT; WATER;

ARTICLE; CHEMISTRY; ELECTROCHEMISTRY; INSTRUMENTATION; METHODOLOGY; NANOTECHNOLOGY; ORGANIC CHEMISTRY; SOLUBILITY; SURFACE PROPERTY; TEMPERATURE;

ACRYLIC RESINS; CALCIUM; CHEMISTRY, ORGANIC; DEXTRANS; ELECTROCHEMISTRY; IONS; NANOTECHNOLOGY; NICKEL; OXIDES; POLYMERS; SOLUBILITY; SOLVENTS; SURFACE PROPERTIES; TEMPERATURE; WATER;

EID: 33645687977     PISSN: 16136810     EISSN: 16136829     Source Type: Journal    
DOI: 10.1002/smll.200400159     Document Type: Article

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