Micromachined Arch-type cantilever as high sensitivity uncooled-infrared detector

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 6, 2005, Pages 3153-3157

  Ivanova, K ^a   Ivanov, Tzv ^a   Rangelow, I W ^a  

^a UNIVERSITY OF KASSEL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; LIGHT ABSORPTION; MICROCELLULAR RADIO SYSTEMS; MICROELECTROMECHANICAL DEVICES; PHOTONS; THERMAL EFFECTS;

ARCH-TYPE MICROCANTILEVER; BIMATERIAL EFFECTS; INFRARED PHOTONS; MICROCANTILEVERS;

INFRARED DETECTORS;

EID: 29044437003     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2134721     Document Type: Article

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