Computationally efficient approaches to characterize the dynamic response of microstructures under mechanical shock

Journal of Microelectromechanical Systems

Volumn 16, Issue 3, 2007, Pages 628-638

  Younis, Mohammad I ^a   Jordy, Daniel ^a   Pitarresi, James M ^a  

^a State University of New York   (United States)

Author keywords

Clamped; High g shock; Micro electromechanical system (MEMS) reliability; Microbeams; Nonlinearity; Reduced order models; Shock spectrum

Indexed keywords

COMPUTATIONAL EFFICIENCY; COMPUTER SIMULATION; DYNAMIC RESPONSE; DYNAMICS; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROSTRUCTURE; SPECTRUM ANALYSIS;

MECHANICAL SHOCK; MICROBEAMS; REDUCED-ORDER MODELS; SHOCK SPECTRUM;

MEMS;

EID: 34547574592     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.896701     Document Type: Article

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