Investigation of the response of microstructures under the combined effect of mechanical shock and electrostatic forces

Journal of Micromechanics and Microengineering

Volumn 16, Issue 11, 2006, Pages 2463-2474

  Younis, Mohammad I ^a   Miles, Ronald ^a   Jordy, Daniel ^a  

^a State University of New York at Binghamton   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; DEGREES OF FREEDOM (MECHANICS); ELECTRODES; ELECTROSTATICS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES;

ELECTROSTATIC ACTUATION; MECHANICAL SHOCK; SMART SWITCHES;

MICROSTRUCTURE;

EID: 33750585743     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/11/030     Document Type: Article

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