The influence of mechanical shock on the operation of electrostatically driven RF-MEMS switches

Journal of Micromechanics and Microengineering

Volumn 14, Issue 9, 2004, Pages

  De Coster, J ^a   Tilmans, H A C ^b   Van Beek, J T M ^c   Ryks, Th G S M ^c   Puers, R ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

^b IMEC   (Belgium)

^c PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; DAMPING; DIFFERENTIAL EQUATIONS; ELECTRIC IMPEDANCE; ELECTRIC POTENTIAL; HARMONIC ANALYSIS; INSERTION LOSSES; PARAMETER ESTIMATION; PERMITTIVITY; SENSITIVITY ANALYSIS; STIFFNESS;

GAS PARAMETERS; POWER HANDLING; RADIO FREQUENCIES (RF); SIGNAL VOLTAGE;

MICROELECTROMECHANICAL DEVICES;

EID: 4544314725     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/9/008     Document Type: Conference Paper

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