High-power optical microswitch based on direct fiber actuation

Sensors and Actuators, A: Physical

Volumn 119, Issue 2, 2005, Pages 512-519

  Cochran, Kevin R ^a,b   Fan, Lawrence ^b   Devoe, Don L ^a  

^a UNIVERSITY OF MARYLAND   (United States)

^b NAVAL SURFACE WARFARE CENTER   (United States)

Author keywords

DRIE; High power; MOEMS; Optical switch; Thermal actuator

Indexed keywords

ACTUATORS; ELECTRIC CURRENTS; MICROELECTROMECHANICAL DEVICES; MULTIMODE FIBERS; SEMICONDUCTOR LASERS; SWITCHING;

DRIE; ELECTROTHERMAL ACTUATORS; MOEMS; OPTICAL MICROSWITCHES;

OPTICAL SWITCHES;

EID: 17044422111     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.10.037     Document Type: Article

References (27)

1. A. Gurbaxani Fully-reversible 'moving fiber' switch permits enhanced applications Proceedings of the SPIE on Components for Fiber Optic Applications II, vol. 839 1987 67 72
2. H. Yamamoto, and H. Ogiwara Moving optical-fiber switch experiment Appl. Opt. 17 1978 3675 3678
3. S. Aoki, T.P. Tanaka, M. Maeda, and H. Takashima Paired optical-fiber switch for optical data-bus systems Opt. Lett. 4 1979 346 347
4. P.G. Hale, and R. Kompener Mechanical optical-fibre switch Electron. Lett. 12 1976 388
5. J.H.C. van Zantvoort, F.M. Huijskens, C.G.P. Herben, and H. de Waardt Fiber-array pigtailing and packaging of an InP-based optical cross-connect chip IEEE J. Sel. Top. Quant. Electron. 5 1999 1255 1259
6. S. Nagaoka Compact latching-type single-mode-fiber switches fabricated by a fiber-micromachining technique and their practical applications IEEE J. Sel. Top. Quant. Electron. 5 1999 36 45
7. C. Gonzalez, and S.D. Collins Magnetically actuated fiber-optic switch with micromachined positioning stages Opt. Lett. 22 1997 709 711
8. R.A. Norwood, J. Holman, L.W. Shacklette, S. Emo, N. Tabatabaie, and H. Guckel Fast, low insertion loss optical switch using lithographically defined electromagnetic microactuators and polymeric passive alignment structures Appl. Phys. Lett. 73 1998 3187 3189
9. M. Hoffmann, D. Nusse, and E. Voges Electrostatic parallel-plate actuators with large deflections for use in optical moving-fibre switches J. Micromech. Microeng. 11 2001 323 328
10. F. Pieri, and M. Piotto A micromachined bistable 1 × 2 switch for optical fibers Microelectron. Eng. 53 2000 561 564
11. P. Kopka, M. Hoffmann, and E. Voges Coupled U-shaped cantilever actuators for 1 × 4 and 2 × 2 fiber switches J. Micromech. Microeng. 10 2000 260 264
12. L.A. Field, D.L. Burriesci, P.R. Robrish, and R.C. Ruby Micromachined 1 × 2 optical-fiber switch Sens. Actuators A: Phys. 53 1996 311 315
13. E. Ollier, and P. Mottier Integrated electrostatic microswitch for optical fibre networks driven by low voltage Electron. Lett. 32 1996 2007 2008
14. T. Bakke, C.P. Tigges, and C.T. Sullivan Silicon-on-insulator micro-mechanical optical switch with post processed polymeric waveguides Proceedings of the SPIE on MOEMS Miniaturized Systems II, vol. 4561 2001 85 92
15. G.J. Veldhuis, T. Nauta, C. Gui, J.W. Berenschot, and P.V. Lambeck Electrostatically actuated mechanooptical waveguide on-off switch showing high extinction at a low actuation-voltage IEEE J. Sel. Top. Quant. Electron. 5 1999 60 65
16. F. Chollet, M. de Labachelerie, and H. Fujita Compact evanescent optical switch and attenuator with electromechanical actuation IEEE J. Sel. Top. Quant. Electron. 5 1999 52 59
17. L. Fan, H. Last, R. Wood, B. Dudley, C.K. Malek, and Z. Ling SLIGA based underwater weapon safety and arming system Microsyst. Technol. 4 1998 168 171
18. K.R. Cochran, D.L. DeVoe, and L. Fan Moving reflector type micro optical switch for high-power transfer in a MEMS-based safety and arming system J. Micromech. Microeng. 14 2004 138 146
19. G. Keiser Optical Fiber Communications 2000 McGraw-Hill Boston
20. W. van Etten, W. Lambo, and P. Simons Loss in multimode fiber connections with a gap Appl. Opt. 24 1985 970 976
21. F.P. Beer, and E.R. Johnston Jr. Mechanics of Materials 1992 McGraw-Hill New York
22. Fiberguide Industries, Mechanical Data of Fused Silica, Manufacturer Data Sheet.
23. J.M. Maloney, D.S. Schreiber, and D.L. DeVoe Large-force electrothermal linear micromotors J. Micromech. Microeng. 14 2004 226 234
24. K.R. Cochran, Development of a micro optical switch fabricated by deep reactive ion etching (DRIE) for high-power transfer applications, MS Thesis, University of Maryland, 2003.
25. G.L. Pearson, and J. Bardeen Electrical properties of pure silicon and silicon alloys containing boron and phosphorus Phys. Rev. 75 1949 865 883
26. J. Maloney, Fabrication and thermal actuation of three dimensional micro electro mechanical systems, MS Thesis, University of Maryland, 2001.
27. S. Nemota, and T. Makimoto Analysis of splice loss in single-mode fibers using a gaussian field approximation Opt. Quant. Electron. 11 1979 447 457