Optimization of the microcrystalline silicon deposition efficiency

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 25, Issue 4, 2007, Pages 1198-1202

  Strahm, B ^a   Howling, A A ^a   Sansonnens, L ^a   Hollenstein, Ch ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CONSTRAINT THEORY; DEPOSITION; PHOTOVOLTAIC CELLS; SILANES; THIN FILMS;

MATERIAL MICROSTRUCTURE; MICROCRYSTALLINE LAYERS; PLASMA PARAMETERS; SILANE UTILIZATION;

MICROCRYSTALLINE SILICON;

EID: 34547257835     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2433985     Document Type: Article

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