Measurements and semi-empirical model describing the onset of powder formation as a function of process parameters in an RF silane-hydrogen discharge

Journal of Physics D: Applied Physics

Volumn 38, Issue 14, 2005, Pages 2382-2389

  Van Den Donker, M N ^a,c   Hamers, E A G ^a   Kroesen, G M W ^b  

^a AKZO NOBEL CENTRAL RESEARCH   (Netherlands)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CARRIER CONCENTRATION; COAGULATION; ELECTRIC DISCHARGES; ELECTRODES; ENTHALPY; HYDROGEN; MATHEMATICAL MODELS; NANOSTRUCTURED MATERIALS; PLASMAS; SILANES; THERMOCOUPLES;

BARATRON PRESSURE GAUGE; DC-BIAS VOLTAGE; PLASMA TRANSITION; SEMI-EMPIRICAL MODELS; SILANE-HYDROGEN DISCHARGE;

POWDERS;

EID: 22144484875     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/38/14/013     Document Type: Article

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