Highly efficient microcrystalline silicon solar cells deposited from a pure SiH4 flow

Applied Physics Letters

Volumn 87, Issue 26, 2005, Pages 1-3

  Van Den Donker, M N ^a   Rech, B ^a   Finger, F ^a   Kessels, W M M ^b   Van De Sanden, M C M ^b  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; DIFFUSION; ELECTROMAGNETIC WAVE EMISSION; PLASMA DEVICES; SILICON COMPOUNDS; SPECTROSCOPIC ANALYSIS;

MICROCRYSTALLINE SILICON SOLAR CELLS; OPTICAL EMISSION; SIH EMISSION; SPECTROSCOPIC STUDY;

SOLAR CELLS;

EID: 29744446678     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2152115     Document Type: Article

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