SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 451-452, Issue , 2004, Pages 466-469

Influence of the total gas flow on the deposition of microcrystalline silicon solar cells

(5) Roschek, Tobias a Rech, Bernd a Müller, Joachim a Schmitz, Ralf a Wagner, Heribert a

a FORSCHUNGSZENTRUM JÜLICH (Germany)

Author keywords

Plasma processing and deposition; Silicon; Solar cells

Indexed keywords

AMORPHOUS MATERIALS; DEPOSITION; DOPING (ADDITIVES); ELECTROCHEMICAL ELECTRODES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; QUANTUM EFFICIENCY; SILANES; SYNTHESIS (CHEMICAL);

GAS FLOW; MICROCRYSTALLINE SOLAR CELLS; PLASMA PROCESSING;

SOLAR CELLS;

EID: 17644448259 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2003.10.128 Document Type: Conference Paper

Times cited : (31)

References (12)

1
- 0035253956
- Meier J., Vallat-Sauvain E., Dubail S., Kroll U., Dubail J., Golay S., Feitknecht L., Torres P., Fay S., Fischer D., Shah A. Sol. Energ. Mater. Sol. Cells. 66:2001;73-84.
- (2001) Sol. Energ. Mater. Sol. Cells , vol.66 , pp. 73-84
- Meier, J.¹ Vallat-Sauvain, E.² Dubail, S.³ Kroll, U.⁴ Dubail, J.⁵ Golay, S.⁶ Feitknecht, L.⁷ Torres, P.⁸ Fay, S.⁹ Fischer, D.¹⁰ Shah, A.¹¹

2
- 0035254870
- Vetterl O., Lambertz A., Dasgupta A., Finger F., Rech B., Kluth O., Wagner H. Sol. Energ. Mater. Sol. Cells. 66:2001;345-351.
- (2001) Sol. Energ. Mater. Sol. Cells , vol.66 , pp. 345-351
- Vetterl, O.¹ Lambertz, A.² Dasgupta, A.³ Finger, F.⁴ Rech, B.⁵ Kluth, O.⁶ Wagner, H.⁷

3
- 0032179064
- Guo L., Kondo M., Fukawa M., Saitoh K., Matsuda A. Jap. J. Appl. Phys. 37:1998;L1116.
- (1998) Jap. J. Appl. Phys. , vol.37 , pp. 1116
- Guo, L.¹ Kondo, M.² Fukawa, M.³ Saitoh, K.⁴ Matsuda, A.⁵

4
- 0035254387
- Rech B., Roschek T., Müller J., Wieder S., Wagner H. Sol. Energ. Mater. Sol. Cells. 66:2001;267-273.
- (2001) Sol. Energ. Mater. Sol. Cells , vol.66 , pp. 267-273
- Rech, B.¹ Roschek, T.² Müller, J.³ Wieder, S.⁴ Wagner, H.⁵

5
- 0036495476
- Roschek T., Repmann T., Müller J., Rech B., Wagner H. J. Vac. Sci. Technol. A. 20:(2):2002;492.
- (2002) J. Vac. Sci. Technol. A , vol.20 , Issue.2 , pp. 492
- Roschek, T.¹ Repmann, T.² Müller, J.³ Rech, B.⁴ Wagner, H.⁵

6
- 0037416712
- Rech B., Roschek T., Repmann T., Müller J., Schmitz R., Appenzeller W. Thin Solid Films. 427:2003;157-165.
- (2003) Thin Solid Films , vol.427 , pp. 157-165
- Rech, B.¹ Roschek, T.² Repmann, T.³ Müller, J.⁴ Schmitz, R.⁵ Appenzeller, W.⁶

7
- 0037416679
- Graf U., Meier J., Kroll U., Bailat J., Droz C., Vallat-Sauvain E., Shah A. Thin Solid Films. 427:2003;37-40.
- (2003) Thin Solid Films , vol.427 , pp. 37-40
- Graf, U.¹ Meier, J.² Kroll, U.³ Bailat, J.⁴ Droz, C.⁵ Vallat-Sauvain, E.⁶ Shah, A.⁷

8
- 0038446352
- Kondo M. Sol. Energ. Mater. Sol. Cells. 66:2003;543-566.
- (2003) Sol. Energ. Mater. Sol. Cells , vol.66 , pp. 543-566
- Kondo, M.¹

9
- 1442285111
- A. Lambertz, O. Vetterl, F. Finger, Proceedings of the 17th European PVSEC (2001) pp. 541-544.
- (2001) Proceedings of the 17th European PVSEC , pp. 541-544
- Lambertz, A.¹ Vetterl, O.² Finger, F.³

10
- 0033170236
- Kluth O., Rech B., Houben L., Wieder S., Schöpe G., Beneking C., Wagner H., Löffl A., Schock H.W. Thin Solid Films. 351:1999;247.
- (1999) Thin Solid Films , vol.351 , pp. 247
- Kluth, O.¹ Rech, B.² Houben, L.³ Wieder, S.⁴ Schöpe, G.⁵ Beneking, C.⁶ Wagner, H.⁷ Löffl, A.⁸ Schock, H.W.⁹

11
- 0036778599
- Feitknecht L., Meier J., Torres P., Zürcher J., Shah A. Sol. Energ. Mater. Sol. Cells. 74:2002;539.
- (2002) Sol. Energ. Mater. Sol. Cells , vol.74 , pp. 539
- Feitknecht, L.¹ Meier, J.² Torres, P.³ Zürcher, J.⁴ Shah, A.⁵

12
- 0034295431
- Hollenstein Ch. Plasma Phys. Control. Fusion. 42:2000;R93-R104.
- (2000) Plasma Phys. Control. Fusion , vol.42 , pp. 93-R104
- Hollenstein, Ch.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.