Perpendicular-incidence photometric ellipsometry of biaxial anisotropic thin films

Applied Optics

Volumn 35, Issue 28, 1996, Pages 5553-5556

  Zuber, Alexander ^a   Jänchen, Heidrun ^a   Kaiser, Norbert ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000233142     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.35.005553     Document Type: Article

References (6)

1. J. M. Nieuwenhuizen and H. B. Haanstra, “Mikrofraktographie dtinner Schichten,” Philips Tech. Rundsch. 27,177-181 (1966).
2. F. Horowitz, “Structure-induced optical anisotropy in thin films,” Ph.D. dissertation (University of Arizona, Tucson, Ariz., 1983).
3. 2films,” Appl. Opt. 32, 5649-5659 (1993).
4. H. Janchen, D. Endelema, N. Kaiser, and F. Flory, “Determination of the refractive indices of highly biaxial anisotropic coatings using guided modes,” Pure Appl. Opt. 5, 405-415 (1996).
5. Q. H. Wu and I. Hodgkinson, “Transmission-mode perpendicular ellipsometry of anisotropic thin films,” J. Opt. (Paris) 25, 43-49 (1994).
6. R. M. A. Azzam, “Perpendicular-incidence photometric ellip-sometry (PIPE) of surfaces with arbitary anisotropy,” J. Opt. (Paris) 12, 317-321 (1981).