Thin films with nanometer-scale pillar microstructure

Journal of Materials Research

Volumn 14, Issue 7, 1999, Pages 3158-3163

  Robbie, K ^a   Shafai, C ^b,c   Brett, M J ^b  

^a QUEEN S UNIVERSITY   (Canada)

^b UNIVERSITY OF ALBERTA   (Canada)

^c UNIVERSITY OF MANITOBA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; METALLIC FILMS; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; POROUS MATERIALS; SEMICONDUCTING FILMS; STRESSES;

GLANCING ANGLE DEPOSITION (GLAD); NANOMETRIC PILLAR MICROSTRUCTURES;

THIN FILMS;

EID: 0032686538     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1999.0423     Document Type: Article

References (22)

1. P.B. Fischer, K. Dai, E. Chen, and S.Y. Chou, J. Vac. Sci. Technol. B 11, 2524 (1993).
2. C.C. Umbach, B.W. Weselak, J.M. Blakely, and Q. Shen, J. Vac. Sci. Technol. B 14, 3420 (1996).
3. P.R. Krauss, P.B. Fisher, and S.Y. Chou, J. Vac. Sci. Technol. B 12, 3639 (1994).
4. W. Chen and H. Ahmed, J. Vac. Sci. Technol. B 11, 2519 (1993).
5. H. van Kranenburg and J.C. Lodder, Mater. Sci. Eng. R. Rep. 11, 293 (1994).
6. L. Abelmann and C. Lodder, Thin Solid Films 305, 1 (1997).
7. R.N. Tait, T. Smy, and M.J. Brett, Thin Solid Films 226, 196 (1993).
8. R. Messier, T. Gehrke, C. Frankel, V.C. Venugopal, W. Otaño, and A. Lakhtakia, J. Vac. Sci. Technol. A 15, 2148 (1997).
9. K. Robbie and M.J. Brett, J. Vac. Sci. Technol. A 15, 1460 (1997).
10. K. Robbie, M.J. Brett, and A. Lakhtakia, Nature 384, 616 (1996).
11. K. Robbie, L.J. Friedrich, S.K. Dew, T. Smy, and M.J. Brett, J. Vac. Sci. Technol. A 13, 1032 (1995).
12. A. Lakhtakia, R. Messier, M.J. Brett, and K. Robbie, Innovat. Mater. Res. 1, 165 (1996).
13. K. Robbie, M.J. Brett, and A. Lakhtakia, J. Vac. Sci. Technol. A 13, 2991 (1995).
14. N. Young and J. Kowal, Nature 183, 104 (1959).
15. K. Robbie, A.J.P. Hnatiw, M.J. Brett, R.I. MacDonald, and J.N. McMullin, Elect. Lett. 33, 1213 (1997).
16. A. Lakhtakia and R. Messier, Mater. Res. Innov. 1, 145 (1998).
17. J.C. Sit, D. Vick, K. Robbie, and M.J. Brett, J. Mater. Res. 14, 1197 (1999).
18. K. Robbie, J.C. Sit, and M.J. Brett, J. Vac. Sci. Technol. B 16, 1115 (1998).
19. F. Liu, M.T. Umlor, L. Shen, J. Weston, W. Eads, J.A. Barnard, and G.J. Mankey, J. Appl. Phys. (1999, in press).
20. J.A. Thornton, J. Vac. Sci. Technol. A 4, 3059 (1986).
21. D. Lamy, A.C. Pierce, and R.B. Heimann, J. Mater. Res. 11, (1996).
22. Selected Papers on Linear Optical Composite Materials edited by A. Lakhtakia, (SPIE Optical Engineering Press, Bellingham, WA, 1996).