Polymer self-assembled nano-structures and surface relief gratings induced with laser at 157 nm

Applied Surface Science

Volumn 253, Issue 19, 2007, Pages 7884-7889

  Sarantopoulou, E ^a   Kollia, Z ^a   Cefalas, A C ^a   Douvas, A M ^b   Chatzichristidi, M ^b   Argitis, P ^b   Kobe, S ^c  

^a THEORETICAL AND PHYSICAL CHEMISTRY INSTITUTE   (Greece)

^b INSTITUTE OF MICROELECTRONICS   (Greece)

^c JO EF STEFAN INSTITUTE   (Slovenia)

Author keywords

157 nm; Fluoropolymers; Light induced structures; Nano structures; Self assembly; Surface relief gratings; VUV

Indexed keywords

FLUORINE CONTAINING POLYMERS; LASER BEAM EFFECTS; SELF ASSEMBLY; SURFACE TREATMENT; THERMODYNAMIC STABILITY;

LIGHT-INDUCED STRUCTURES; SELF-ORGANIZED GRATING; SURFACE RELIEF GRATINGS (SRG);

NANOSTRUCTURES;

EID: 34447539950     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.02.071     Document Type: Article

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