Nanostructure fabrication in silicon using cesium to pattern a self-assembled monolayer

Applied Physics Letters

Volumn 71, Issue 9, 1997, Pages 1261-1263

  Younkin, R ^a   Berggren, K K ^a   Johnson, K S ^a   Prentiss, M ^a   Ralph, D C ^b   Whitesides, G M ^c  

^a HARVARD UNIVERSITY   (United States)

^b Department of Population Medicine and Diagnostic Sciences   (United States)

^c HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000585603     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.119867     Document Type: Article

References (24)

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