Batch fabrication of atomic force microscopy probes with recessed integrated ring microelectrodes at a wafer level

Analytical Chemistry

Volumn 79, Issue 13, 2007, Pages 4769-4777

  Shin, Heungjoo ^a,b   Hesketh, Peter J ^b   Mizaikoff, Boris ^a   Kranz, Christine ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BATCH PROCESSING; REPRODUCIBILITY; SCANNING ELECTROCHEMICAL MICROSCOPY (SECM);

CORRELATION METHODS; FINITE ELEMENT METHOD; MICROELECTRODES; MICROFABRICATION; OPTIMIZATION; SILICA; SILICON CARBIDE;

ATOMIC FORCE MICROSCOPY;

ARTICLE; ATOMIC FORCE MICROSCOPY; DIFFUSION; MICROELECTRODE; SCANNING ELECTROCHEMICAL MICROSCOPY; SIMULATION;

BIOSENSING TECHNIQUES; DIFFUSION; ELECTROCHEMISTRY; EQUIPMENT DESIGN; MICROELECTRODES; MICROSCOPY, ATOMIC FORCE; MICROSCOPY, SCANNING PROBE; PLATINUM; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY; SILICON DIOXIDE; SURFACE PROPERTIES;

EID: 34447317288     PISSN: 00032700     EISSN: None     Source Type: Journal    
DOI: 10.1021/ac070598u     Document Type: Article

References (59)

1. Liu, H.-Y.; Fan, F.-R. F.; Lin, C. W.; Bard, A. J. J. Am. Chem. Soc. 1986, 108, 3838-3839.
2. Bard, A. J.; Fan, F.-R. F.; Pierce, D. T.; Unwin, P. R.; Wipf, D. O.; Zhou, F. Science 1991, 254, 68-74.
3. Pierce, D. T.; Bard, A. J. Anal. Chem. 1993, 65, 3598-3604.
4. Shiku, H.; Ohya, H.; Matsue, T. In Encyclopedia of Electrochemistry, Wilson, G. S., Ed.; Wiley-VCH: Weinheim, 2002; Vol. 9, pp 257, 259-275.
5. Scanning Electrochemical Microscopy, Bard, A.J., Mirkin, M. V., Eds.; Marcel Dekker, Inc.: New York, 2001.
6. Bard, A. J.; Fan, F. R. F.; Kwak, J.; Lev, O. Anal. Chem. 1989, 61, 132-138.
7. Denuault, G.; Frank, M. H. T.; Peter, L. M. Faraday Discuss. 1992, 94, 23-35.
8. Horrocks, B. J.; Mirkin, M. V.; Pierce, D. T.; Bard, A. J.; Nagy, G.; Toth, K. Anal. Chem. 1993, 65, 1213-1224.
9. Katemann, B. B.; Inchauspe, C. G.; Castro, P. A.; Schulte, A.; Calvo, E. J.; Schuhmann, W. Electrochim. Acta 2003, 48, 1115-1121.
10. Ervin, E. N.; White, H. S.; Baker, L. A. Anal. Chem. 2005, 77, 5564-5569.
11. Diakowski, P. M.; Baranski, A. S. Electrochim. Acta 2006, 52, 854-862.
12. Macpherson, J. V.; Unwin, P. R. Anal. Chem. 2000, 72, 276-285.
13. Selzer, Y.; Mandler, D. Anal. Chem. 2000, 72, 2383-2390.
14. Kranz, C.; Friedbacher, G.; Mizaikoff, B.; Lugstein, A.; Smoliner, J.; Bertagnolli, E. Anal. Chem. 2001, 73, 2491-2500.
15. Macpherson, J. V.; Unwin, P. R. Anal. Chem. 2001, 73, 550-557.
16. Abbou, J.; Demaille, C.; Druet, M.; Moiroux, J. Anal. Chem. 2002, 74, 6355-6363.
17. Gardner, C. E.; MacPherson, J. V. Anal. Chem. 2002, 74, 576A-584A.
18. Lugstein, A.; Bertagnolli, E.; Kranz, C.; Mizaikoff, B. Surf. Interface Anal. 2002, 33, 146-150.
19. Fasching, R. J.; Tao, Y.; Hammerick, K.; Prinz, F. B. Proc. SPIE: Int. Soc. Opt. Eng. 2003, 5116, 128-135.
20. Kueng, A.; Kranz, C.; Lugstein, A.; Bertagnolli, E.; Mizaikoff, B. Angew. Chem., Int. Ed. 2003, 42, 3238-3240.
21. Kueng, A.; Kranz, C.; Mizaikoff, B.; Lugstein, A.; Bertagnolli, E. Appl. Phys. Lett. 2003, 82, 1592-1594.
22. Hirata, Y.; Yabuki, S.; Mizutani, F. Bioelectrochemistry 2004, 63, 217-224.
23. Davoodi, A.; Pan, J.; Leygraf, C.; Norgren, S. Electrochem. Solid-State Lett. 2005, 8, B21-B24.
24. Kueng, A.; Kranz, C.; Lugstein, A.; Bertagnolli, E.; Mizaikoff, B. Angew. Chem., Int. Ed. 2005, 44, 3419-3422.
25. Gullo, M. R.; Frederix, P. L. T. M.; Akiyama, T.; Engel, A.; de Rooij, N. F.; Staufer, U. Anal. Chem. 2006, 78, 5436-5442.
26. Burt, D. P.; Wilson, N. R.; Weaver, J. M. R.; Dobson, P. S.; Macpherson, J. V. Nana Lett. 2005, 5, 639-643.
27. Fulian, Q.; Fisher, A. C.; Denuault, G. J. Phys. Chem. B 1999, 103, 4387-4392.
28. Liljeroth, P.; Johans, C.; Slevin, C. J.; Quinn, B. M.; Kontturi, K. Anal. Chem. 2002, 74, 1972-1978.
29. Sklyar, O.; Wittstock, G. J. Phys. Chem. B 2002, 106, 7499-7508.
30. Sklyar, O.; Ufheil, J.; Heinze, J.; Wittstock, G. Electrochim. Acta 2003, 49, 117-128.
31. Zoski, C. G.; Liu, B.; Bard, A. J. Anal. Chem. 2004, 76, 3646-3654.
32. Combellas, C.; Fuchs, A.; Kanoufi, F. Anal. Chem. 2004, 76, 3612-3618.
33. Alpuche-Aviles, M. A.; Wipf, D. O. Anal. Chem. 2001, 73, 4873-4881.
34. Wipf, D. O.; Bard, A. J.; Tallman, D. E. Anal. Chem. 1993, 65, 1373-1377.
35. Buchler, M.; Kelley, S. C.; Smyrl, W. H. Electochem. Solid-State Lett. 2000, 3, 35-38.
36. Katemann, B. B.; Schulte, A.; Schuhmann, W. Chem.-A Eur. J. 2003, 9, 2025-2033.
37. Etienne, M.; Anderson, E. C.; Evans, S. R.; Schuhmann, W.; Fritsch, I. Anal. Chem. 2006, 78, 7317-7324.
38. Etienne, M.; Schulte, A.; Mann, S.; Jordan, G.; Dietzel, I. D.; Schuhmann, W. Anal. Chem. 2004, 76, 3682-3688.
39. Jones, C. E.; Macpherson, J. V.; Barber, Z. H.; Somekh, R. E.; Unwin, P. R. Electrochem. Commun. 1999, 1, 55-60.
40. Macpherson, J. V.; Jones, C. E.; Unwin, P. R. Proc. Electrochem. Soc. 2000, 99-28, 147-165.
41. Macpherson, J. V.; Zhang, J.; Gardner, C. E.; Unwin, P. R. Anal. Sci. 2001, 17, i333-i336.
42. Lugstein, A.; Bertagnolli, E.; Kranz, C.; Mizaikoff, B. Appl. Phys. Lett. 2002, 81, 349-351.
43. Fasching, R. J.; Tao, Y.; Prinz, F. B. Chem. Sens. 2004, 20, 318-319.
44. Kranz, C.; Kueng, A.; Lugstein, A.; Bertagnolli, E.; Mizaikoff, B. Ultramicroscopy 2004, 100, 127-134.
45. Dobson, P. S.; Weaver, J. M. R.; Holder, M. N.; Unwin, P. R.; Macpherson, J. V. Anal. Chem. 2005, 77, 424-434.
46. Fasching, R. J.; Tao, Y.; Prinz, F. B. Sens. Actuators, B 2005, 108, 964-972.
47. Slevin, C. J.; Gray, N. J.; Macpherson, J. V.; Webb, M. A.; Unwin, P. R. Electrochem. Commun. 1999, 1, 282-288.
48. Shin, H.; Hesketh, P. J.; Kranz, C.; Rudolph, D. A.; Mizaikoff, B. Proc. IMECE 2005 MEMS 2005, 7, 383-387.
49. Mehregany, M.; Zorman, C. A.; Rajan, N.; Wu, C. H. Proc. IEEE 1998, 86, 1594-1610.
50. Choudhury, A.; Hesketh, P. J. Micro-Electro-Mech. Syst. 2004, 6, 55-62.
51. Smythe, W. R. J. Appl. Phys. 1951, 22, 1499-1501.
52. Fleischmann, M.; Bandyopadhyay, S.; Pons, S. J. Phys. Chem. 1985, 89 5537-5541.
53. Fleischmann, M.; Pons, S. J. Electroanal. Chem. 1987, 222, 107-115.
54. Pons, S.; Fleischmann, M. Anal. Chem. 1987, 59, 1391A-1399A.
55. Szabo, A. J. Phys. Chem. 1987, 91, 3108-3111.
56. Phillips, C. G.; Stone, H. A. J. Electroanal. Chem. 1995, 396, 277-283.
57. Lee, Y.; Ameymia, S.; Bard, A. J. Anal. Chem. 2001, 73, 2261-2267.
58. Sklyar, O.; Kueng, A.; Kranz, C.; Mizaikoff, B.; Lugstein, A.; Bertagnolli, E.; Wittstock, G. Anal. Chem. 2005, 77, 764-771.
59. Hutter, J. L.; Bechhoefer, J. Rev. Sci. Instrum. 1993, 64, 1868-1873.