Parametric linear modeling of circular cMUT membranes in vacuum

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 54, Issue 6, 2007, Pages 1229-1239

  Köymen, Hayrettin ^a,b   Şenlik, Muhammed N ^a,b   Alar, Abdullah At ^a,b   Olcum, Selim ^a,b  

^a IEEE   (Turkey)

^b BILKENT UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS; CIRCULAR MEMBRANES; FINITE ELEMENT SIMULATION; MECHANICAL IMPEDANCE;

COMPUTER SIMULATION; FINITE ELEMENT METHOD; LINEAR SYSTEMS; LUMPED PARAMETER NETWORKS; MICROMACHINING; NATURAL FREQUENCIES; ULTRASONIC TRANSDUCERS; VACUUM;

MEMBRANES;

ARTICLE; ARTIFICIAL MEMBRANE; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; ECHOGRAPHY; ELECTRIC CAPACITANCE; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY; STATISTICAL MODEL; TRANSDUCER; VACUUM;

COMPUTER SIMULATION; COMPUTER-AIDED DESIGN; ELECTRIC CAPACITANCE; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; LINEAR MODELS; MEMBRANES, ARTIFICIAL; MINIATURIZATION; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY; TRANSDUCERS; ULTRASONOGRAPHY; VACUUM;

EID: 34347211396     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2007.376     Document Type: Article

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