Dynamic fem analysis of multiple cMUT cells in immersion

Proceedings - IEEE Ultrasonics Symposium

Volumn 1, Issue , 2004, Pages 252-255

  Bayram, Baris ^a   Yaralioglu, Goksen G ^a   Ergun, Arif Sanli ^a   Oralkan, Ömer ^a   Khuri Yakub, Butrus T ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC OUTPUT PRESSURE; CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS (CMUT); COLLAPSE-SNAPBACK OPERATIONS; PERFECTLY MATCHED LAYER (PML);

DATA ACQUISITION; FINITE ELEMENT METHOD; HYDROPHONES; MATHEMATICAL MODELS; MICROMACHINING; SILICA;

ULTRASONIC TRANSDUCERS;

EID: 21644468628     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

1. M. I. Haller and B. T. Khuri-Yakub, "A Surface Micromachined Electrostatic Ultrasonic Air Transducer", in Proceedings of Ultrasonics Symposium, pp. 1241-1244, Cannes, France, 1994.
2. H. T. Soh, I. Ladabaum, A. Atalar, C. F. Quate, and B. T. Khuri-Yakub, "Silicon Micromaohined Ultrasonic Immersion Transducers", Appl. Phys. Lett., Vol. 69, pp. 3674-3676, Dec. 1996.
3. P. C. Eccardt, K. Niederer, and B. Fischer, "Micromachined Transducers for Ultrasound Applications", in Proceedings of Ultrasonics Symposium, pp.1609-1618, 1997.
4. I. Ladabaum, X. Jin, H. T. Soh, A. Atalar, B. T. Khuri-Yakub, "Surface Micromachined Capacitive Ultrasonic Transducers", IEEE Trans. on UFFC, Vol. 45, No. 3, pp. 678-690, May 1998.
5. B. Bayram, E. Hæggström, G. G. Yaralioglu, and B. T. Khuri-Yakub, "A New Regime for Operating Capacitive Micromachined Ultrasonic Transducers", IEEE Trans. on UFFC, Vol. 50, No. 9, pp. 1184-1190, Sep 2003.
6. Y. Huang, B. Bayram, A.S. Ergun, E. Hæggström, C.H. Cheng, and B.T. Khuri-Yakub, "Collapsed Region Operation of Capacitive Micromachined Ultrasonic Transducers based on Wafer-bonding Technique", in Proceedings of IEEE Ultrasonics Symposium, Vol. 2, pp. 1161-1164, 2003.
7. B. Bayram, Ö. Oralkan, A.S. Ergun, E. Hæggström, G.G. Yaralioglu, and B.T. Khuri-Yakub, "Capacitive Micromachined Ultrasonic Transducer Design for High Power Transmission", accepted for publication in IEEE Trans. on UFFC.
8. LS-DYNA 970, Livermore Software Technology Corporation, Livermore, CA 94551.
9. LS-DYNA 970 Keyword User's Manual, Livermore Software Technology Corporation, Livermore, CA, 2003
10. J. P. Berenger, "A Perfectly Matched Layer for the Absorption of Electromagnetic Waves", J. Comput. Phys., vol. 114, pp. 185-200, October 1994.
11. O. Oralkan, X. Jin, F.L. Degertekin, and B.T. Khuri-Yakub, "Simulation and Experimental Characterization of a 2-D Capacitive Micromachined Ultrasonic Transducer Array Element," IEEE Trans. on UFFC, Vol. 46, No. 6, pp. 1337-1340, November 1999.
12. G. Festa. and S. Nielsen, "PML Absorbing Boundaries", Bulletin of the Seismological Society of America, Vol. 93, No. 2, pp. 891-903, April 2003.
13. X. Yuan, D. Borup, J.W. Wiskin, M. Berggren, R. Eidens, and S.A. Johnson, "Formulation and Validation of Berenger's PML Absorbing Boundary for the FDTD Simulation of Acoustic Scattering", IEEE Trans. on UFFC, Vol. 44, No. 4, pp. 816-821, July 1997.