Robust capacitive MEMS ultrasonics transducers for liquid immersion

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2003, Pages 581-584

  Greve, D W ^a   Neumann, J J ^a   Oppenheim, I J ^b   Pessiki, S P ^c   Ozevin, D ^c  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b CARNEGIE MELLON UNIVERSITY   (United States)

^c Lehigh University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; BANDWIDTH; CAPACITANCE; DIAPHRAGMS; DISTORTION (WAVES); LASER PULSES; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION; ROBUSTNESS (CONTROL SYSTEMS); SILICON;

CAPACITIVE DIAPHRAGMS; ETCH HOLES; PULSE DISTORTION; STRAY CAPACITANCE;

ULTRASONIC TRANSDUCERS;

EID: 4143097165     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. "Surface micromachined ultrasound transducers in CMOS technology," P.-C. Eccardt, K. Niederer, T. Scheiter, and C. Hierold, 1996 IEEE Ultrasonics Symposium, pp. 959-962 (1996).
2. "Micromachined ultrasonic capacitance transducers for immersion applications," A.G. Bashford, D.W. Schindel, D.A. Hutchins, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 45, pp. 367-375 (1998).
3. "Characterization of one-dimensional capacitive micromachined ultrasonic immersion transducer arrays," X. Jin, I. Ladabaum, F.L. Degertekin, S. Calmes, and B.T. Khuri-Yakub, IEEE Journal of Microelectromechanical Systems, vol. 8, pp. 100-114 (1999).
4. X. Jin, O. Oralkan, F.L. Degertekin, and B.T. Khuri-Yakub, "Characterization of one-dimensional capacitive micromachined ultrasonic immersion transducer arrays," IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 48, pp. 750-760 (2001).
5. "MEMS Ultrasonic Transducers for the Testing of Solids," I.J. Oppenheim, A. Jain, and D.W. Greve, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 50, pp, 305-311 (2003).
6. "MEMS Phased Array Detection in Contact with Solids," D.W. Greve, A. Jain, and I.J. Oppenheim, 2003 IEEE Ultrasonics Symposium, paper 5D-6.
7. "Electrical Characterization of Coupled and Uncoupled MEMS Ultrasonic Transducers," I.J. Oppenheim, A. Jain, and D.W. Greve, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 50, pp, 297-304 (2003).
8. "Ultrasonic Transducers For Nondestructive Testing," catalog published by Krautkramer, Inc., (April 2001).