Accurate modeling of CMUTs

Proceedings - IEEE Ultrasonics Symposium

Volumn 1, Issue , 2004, Pages 264-269

  Lerch, R ^a   Kaltenbacher, M ^a   Hauck, A ^a   Link, G ^a   Hofer, M ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED ENGINEERING; COMPUTER SIMULATION; FINITE ELEMENT METHOD; LAGRANGE MULTIPLIERS; MICROMACHINING; PIEZOELECTRIC TRANSDUCERS; TENSORS;

ACOUSTIC POTENTIAL; CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT); LAGRANGIAN FORMULATION; MICROMACHINED MICROPHONES;

ULTRASONIC TRANSDUCERS;

EID: 21644438869     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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3. J.L. Coulomb and G. Meunier, Finite Element Implementation of Virtual Work Principle for Magnetic and Electric Force and Torque Computation, IEEE Transactions on Magnetics 20 (1984), no. 5, 1894-1896.
4. M. Füldner, A. Dehe, R. Aigner, and R. Lerch, FEM-unterstützte Netzwerksimulation kapazitiver Silizium-Mikrofone, DAGA 2003, 2003.
5. A. Hauck, Numerical Simulation of Coupled Electro-Mechanical Systems using the Finite Element Method, Bachelor Thesis, University of Erlangen, 2003.
6. M. Kaltenbacher, Numerical Simulation of Mechatronic Sensors and Actuators, Springer Berlin-Heidelberg-New York, 2004.