Improved equivalent circuit and finite element method modeling of capacitive micromachined ultrasonic transducers

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2003, Pages 469-472

  Yaralioglu, Goksen G ^a   Badi, Mohammed H ^a   Ergun, A Sanli ^a   Khuri Yakub, Butrus T ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE MICROMACHINED ULTRASOUND TRANSDUCERS (CMUT); HEXAGONAL MEMBRANES; MEMBRANE DEFLECTION;

BANDWIDTH; CAPACITANCE; ELECTRIC CURRENTS; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROMACHINING; NETWORKS (CIRCUITS); OPTIMIZATION; VACUUM;

ULTRASONIC TRANSDUCERS;

EID: 4143049306     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. W.P. Mason, "Electromechanical Transducers and Wave Filters", D. Van Nostrand Company Inc., London, 1948.
2. nd ed. 1982.
3. I. Ladabaum, Xuecheng Jin, H. T. Soh, A. Atalar, and B. T. Khuri-Yakub, "Surface micromachined capacitive ultrasonic transducers," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 45, pp. 678-690, May 1998.
4. Butrus T. Khuri-Yakub et al., "Silicon Micromachined Ultrasonic Transducers," Jpn. J. Appl. Phys. 39, 2883-2887 (May 2000).
5. Yaralioglu et al., "Calculation and measurement of electromechanical coupling coefficient of CMUT transducers," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 50, pp. 449-456, April 2003.