Acoustic Coupling in Capacitive Microfabricated Ultrasonic Transducers: Modeling and Experiments

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 52, Issue 12, 2005, Pages 2220-2234

  Caronti, Alessandro ^a   Savoia, Alessandro ^a   Caliano, Giosuè ^a   Pappalardo, Massimo ^a  

^a ROMA TRE UNIVERSITY   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

DIAGNOSTIC AGENT;

ACOUSTICS; ARTICLE; ARTIFICIAL MEMBRANE; COMPARATIVE STUDY; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; ECHOGRAPHY; ELECTRIC CAPACITANCE; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; EVALUATION; FINITE ELEMENT ANALYSIS; INSTRUMENTATION; METHODOLOGY; STATISTICAL MODEL; TRANSDUCER;

ACOUSTICS; COMPUTER SIMULATION; COMPUTER-AIDED DESIGN; ELECTRIC CAPACITANCE; ELECTRONICS, MEDICAL; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; FINITE ELEMENT ANALYSIS; LINEAR MODELS; MEMBRANES, ARTIFICIAL; MINIATURIZATION; TRANSDUCERS; ULTRASONOGRAPHY;

EID: 33644855948     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2005.1563265     Document Type: Article

References (29)

1. O. Oralkan, A. S. Ergun, J. A. Johnson, M. Karaman, U. Demirci, K. Kaviani, T. H. Lee, and B. T. Khuri-Yakub, “Capacitive micromachined ultrasonic transducers: Next-generation arrays for acoustic imaging?,” IEEE Trans. Ultrason., Ferro-elect., Freq. Contr., vol. 49, no. 11, pp. 1596–1610, 2002.
2. S. Panda, C. Daft, P. Wagner, I. Ladabaum, P. Pellegretti, and F. Bertora, “Capacitive microfabricated ultrasonic transducer (CMUT) probes: Imaging advantages over PZT probes,” presented at the 3rd International Workshop on Micromachined Ultrasonic Transducers, Lausanne, Switzerland, June 26—27, 2003.
3. G. Caliano, R. Carotenuto, E. Cianci, V. Foglietti, A. Caronti, and M. Pappalardo, “Echographic images generated by a capacitive micromachined ultrasonic probe,” presented at U.S. Navy Workshop on Acoustic Transduction Materials and Devices, State College, PA, May 10–13, 2004.
4. K. A. Wong, S. Panda, and I. Ladabaum, “Curved micromachined ultrasonic transducers,” in Proc. IEEE Ultrason. Symp., 2003, pp. 572–576.
5. O. Oralkan, A. S. Ergun, C. H. Cheng, J. A. Johnson, M. Karaman, T. H. Lee, and B. T. Khuri-Yakub, “Volumetric ultrasound imaging using 2-D CMUT arrays,” IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 50, no. 11, pp. 1581–1594, 2003.
6. P. C. Eccardt and K. Niederer, “Micromachined ultrasound transducers with improved coupling factors from a CMOS compatible process,” Ultrasonics, vol. 38, pp. 774–780, 2000.
7. X. Jin, O. Oralkan, F. L. Degertekin, and B. T. Khuri-Yakub, “Characterization of one-dimensional capacitive micromachined ultrasonic immersion transducer arrays,” IEEE Trans. Ultra-son., Ferroelect., Freq. Contr., vol. 48, no. 3, pp. 750–760, 2001.
8. J. McLean and F. L. Degertekin, “Interdigital capacitive micromachined ultrasonic transducers for sensing and pumping in microfluidic applications,” in Proc. Int. Conf. Solid-State Sens. Actuat. Microsyst., 2003, pp. 915–918.
9. A. Caronti, D. Fiasca, G. Caliano, and M. Pappalardo, “An experimental study of cross-coupling and acoustic interactions in 1-D capacitive micromachined ultrasonic transducer arrays,” presented at the U.S. Navy Workshop on Acoustic Transduction Materials and Devices, State College, PA, May 6–8, 2003.
10. A. Caronti, D. Fiasca, G. Caliano, E. Cianci, and M. Pappalardo, “Experimental study of acoustic coupling in CMUT arrays by optical interferometry,” in Proc. IEEE Ultrason. Symp., 2003, pp. 1960–1964.
11. C. H. Sherman, “Analysis of acoustic interactions in transducer arrays,” IEEE Trans. Sonics Ultrason., vol. 13, no. 1, pp. 9–15, 1966.
12. R. L. Pritchard, “Mutual acoustic impedance between radiators in an infinite rigid plane,” J. Acoust. Soc. Amer., vol. 32, no. 6, pp. 730–737, 1960.
13. D. T. Porter, “Self and mutual radiation impedance and beam patterns for flexural disks in a rigid plane,” J. Acoust. Soc. Amer., vol. 36, no. 6, pp. 1154–1161, 1964.
14. E. M. Arase, “Mutual radiation impedance of square and rectangular pistons in a rigid infinite baffle,” J. Acoust. Soc. Amer., vol. 36, no. 8, pp. 1521–1525, 1964.
15. C. H. Sherman, “Mutual radiation impedance of sources on a sphere,” J. Acoust. Soc. Amer., vol. 31, no. 7, pp. 947–952, 1959.
16. J. E. Greenspon and C. H. Sherman, “Mutual radiation impedance and nearfield pressure for pistons on a cylinder,” J. Acoust. Soc. Amer., vol. 36, no. 1, pp. 149–153, 1964.
17. C. Audoly, “Some aspects of acoustic interactions in sonar transducer arrays,” J. Acoust. Soc. Amer., vol. 89, no. 3, pp. 1428–1433, 1991.
18. J. Lee, I. Seo, and S. M. Han, “Radiation power estimation for sonar transducer arrays considering acoustic interaction,” Sens. Actuat. A, vol. 90, pp. 1–6, 2001.
19. H. Lee, J. Tak, W. Moon, and G. Lim, “Effects of mutual impedance on the radiation characteristics of transducer arrays,” J. Acoust. Soc. Amer., vol. 115, no. 2, pp. 666–679, 2004.
20. A. D. Pierce, Acoustics. An Introduction to Its Physical Principles and Applications. New York: American Institute of Physics, 1994, pp. 208–211.
21. A. Caronti, R. Carotenuto, G. Caliano, and M. Pappalardo, “The effects of membrane metallization in capacitive microfabricated ultrasonic transducers,” J. Acoust. Soc. Amer., vol. 115, no. 2, pp. 651–657, 2004.
22. F. V. Hunt, Electroacoustics. The Analysis of Transduction, and Its Historical Background. New York: American Institute of Physics, 1982.
23. D. S. Burnett and W. W. Soroka, “Tables of rectangular piston radiation impedance functions, with application to sound transmission loss through deep apertures,” J. Acoust. Soc. Amer., vol. 51, no. 5, pp. 1618–1623, 1972.
24. W. P. Mason, Electromechanical Transducers and Wave Filters. 2nd ed. Van Nostrand Company, 1943.
25. G. G. Yaralioglu, M. H. Badi, A. S. Ergun, and B. T. Khuri-Yakub, “Improved equivalent circuit and finite element method modeling of capacitive micromachined ultrasonic transducers,” in Proc. IEEE Ultrason. Symp., 2003, pp. 469–472.
26. A. Caronti, H. Majjad, S. Ballandras, G. Caliano, R. Carotenuto, A. Iula, V. Foglietti, and M. Pappalardo, “Vibration maps of capacitive micromachined ultrasonic transducers by laser interferometry,” IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 49, no. 3, pp. 289–292, 2002.
27. J. A. Jensen, “Field: A program for simulating ultrasound systems,” Med. Biol. Eng. Comput., vol. 34, no. 1, pp. 351–353, 1996.
28. L. E. Kinsler, A. R. Frey, A. B. Coppens, and J. V. Sanders, Fundamentals of Acoustics. 4th ed. New York: Wiley, 2000.
29. L. L. Foldy, “Theory of passive linear electroacoustic transducers with fixed velocity distribution,” J. Acoust. Soc. Amer., vol. 21, no. 6, pp. 595–604, 1949.