Dynamic analysis of CMUTs in different regimes of operation

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2003, Pages 481-484

  Bayram, Baris ^a   Haeggström, Edward ^a   Ergun, Arif Sanli ^a   Yaralioglu, Goksen G ^a   Khuri Yakub, Butrus T ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS (CMUT); RESONANCE FREQUENCY; SILICON OXIDE INSULATION;

ELECTRIC POTENTIAL; ELECTROSTATICS; FINITE ELEMENT METHOD; HARMONIC GENERATION; MATHEMATICAL MODELS; MICROMACHINING; SILICON; SUBSTRATES;

ULTRASONIC TRANSDUCERS;

EID: 4143133359     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. M. I. Haller and B. T. Khuri-Yakub, "A surface micromachined electrostatic ultrasonic air transducer" in Proceedings of Ultrasonics Symposium, pp. 12411244, Cannes, France, 1994.
2. H. T. Soh, I. Ladabaum, A. Atalar, C. F. Quate, and B. T. Khuri-Yakub, "Silicon micromachined ultrasonic immersion transducers", Appl. Phys. Lett., Vol. 69, pp. 3674-3676, December 1996.
3. I. Ladabaum, X. Jin, H. T. Soh, A. Atalar, and B. T. Khuri-Yakub, "Surface micromachined capacitive ultrasonic transducers", IEEE Trans. on UFFC, Vol. 45, No. 3, pp. 678-690, May 1998.
4. B. Bayram, E. Haeggström, G. G. Yaralioglu, and B. T. Khuri-Yakub, "A new regime for operating capacitive micromachined ultrasonic transducers", IEEE Trans. on UFFC, Vol. 50, No. 9, pp. 1184-1190, Sep 2003.
5. M. J. Grote, "Nonreflecting Boundary Conditions for Time Dependent Wave Propagation", M. J. Grote, Artificial Boundary Conditions with Applications to Computational Fluid Dynamics, Ed. L. Tourrette, Nova Science Publishers Inc., New York, 2001.