CMUT Array Modeling Through Free Acoustic CMUT Modes and Analysis of the Fluid CMUT Interface Through Fourier Transform Methods

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 52, Issue 12, 2005, Pages 2173-2184

  Rønnekleiv, Arne ^a  

^a NORWEGIAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Norway)

Author keywords

[No Author keywords available]

Indexed keywords

DIAGNOSTIC AGENT;

ACOUSTICS; ARTICLE; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; ECHOGRAPHY; ELECTRIC CAPACITANCE; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; EVALUATION; FOURIER ANALYSIS; INSTRUMENTATION; METHODOLOGY; MICROFLUIDICS; THEORETICAL MODEL; TRANSDUCER;

ACOUSTICS; COMPUTER SIMULATION; COMPUTER-AIDED DESIGN; ELECTRIC CAPACITANCE; ELECTRONICS, MEDICAL; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; FOURIER ANALYSIS; MICROFLUIDICS; MINIATURIZATION; MODELS, THEORETICAL; TRANSDUCERS; ULTRASONOGRAPHY;

EID: 33644865434     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2005.1563261     Document Type: Article

References (35)

1. M. I. Haller and B. T. Khuri-Yakub, “A surface micromachined electrostatic ultrasonic air transducer,” IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 43, pp. 1-6, Jan. 1996.
2. I. Ladabaum, J. Xuecheng, H. T. Soh, A. Atalar, and B. T. Khuri-Yakub, “Surface micromachined capacitive ultrasonic transducers,” IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 45, pp. 678–690, May 1998.
3. A. Bozkurt, I. Ladabaum, A. Atalar, and B. T. Khuri-Yakub, “Theory and analysis of electrode size optimization for capacitive microfabricated ultrasonic transducers,” IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 46, pp. 1364–1374, Nov. 1999.
4. O. Oralkan, X. C. Jin, F. L. Degertekin, and B. T. Khuri-Yakub, “Simulation and experimental characterization of a 2-D capacitive micromachined ultrasonic transducer array element,” IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 46, pp. 1337–1340, Nov. 1999.
5. X. C. Jin, O. Oralkan, F. L. Degertekin, and B. T. Khuri-Yakub, “Characterization of one-dimensional capacitive micromachined ultrasonic immersion transducer arrays,” IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 48, pp. 750–760, May 2001.
6. X. C. Jin, I. Ladabaum, F. L. Degertekin, S. Calmes, and B. T. Khuri-Yakub, “Fabrication and characterization of surface micromachined capacitive ultrasonic immersion transducers,” IEEE J. Microelectromech. Syst., vol. 8, pp. 100-114, Mar. 1999.
7. P.-C. Eccardt, K. Niederer, T. Scheiter, and C. Hierold, “Surface micromachined ultrasound transducers in CMOS technology,” in Proc. IEEE Ultrason. Symp., 1996, pp. 959-962.
8. G. G. Yaralioglu, A. S. Ergun, B. Bayram, E. Haeggstrom, and B. T. Khuri-Yakub, “Calculation and measurement of electromechanical coupling coefficient of capacitive micromachined ultrasonic transducers,” IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 50, pp. 449-456, Apr. 2003.
9. B. Bayram, E. Haeggstrom, G. G. Yaralioglu, and B. T. Khuri-Yakub, “A new regime for operating capacitive micromachined ultrasonic transducers,” IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 50, pp. 1184-1190, Sep. 2003.
10. A. Buhrdorf, A. Lohfink, S. Junge, P.-C. Eccardt, and W. Benecke, “Fabrication and characterization of a new capacitive micromachined ultrasonic transducer (cMUT) using polysilicon as membrane and sacrificial layer material,” in Proc. IEEE Ultrason. Symp., 2003, pp. 1951-1954.
11. M. H. Badi, G. G. Yaralioglu, A. S. Ergun, S. T. Hansen, E. J. Wong, and B. T. Khuri-Yakub, “Capacitive micromachined ultrasonic Lamb wave transducers using rectangular membranes,” IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 50, pp. 1191-1203, Sep. 2003.
12. Y. Huang, E. Haeggstrom, B. Bayram, Z. Zhuang, A. S. Ergun, C. H. Cheng, and B. T. Khuri-Yakub, “Collapsed regime operation of capacitive micromachined ultrasonic transducers based on wafer-bonding technique,” in Proc. IEEE Ultrason. Symp., 2003, pp. 1161-1164.
13. R. A. Noble, R. R. Davies, M. M. Day, L. Koker, D. O. King, K. M. Brunson, A. R. D. Jones, J. S. McIntosh, P. A. Hutchins, T. J. Robertson, and P. Saul, “Cost-effective and manufacturable route to the fabrication of high-density 2D micromachined ultrasonic transducer arrays and (CMOS) signal conditioning electronics on the same silicon substrate,” in Proc. IEEE Ultrason. Symp., 2001, pp. 941-944.
14. C. H. Cheng, E.M. Chow, X. C. Jin, S. Ergun, and B. T. Khuri-Yakub, “An efficient electrical addressing method using throughwafer vias for two-dimensional ultrasonic arrays,” in Proc. IEEE Ultrason. Symp., 2000, pp. 1179-1182.
15. O. Oralkan, A. S. Ergun, J. A. Johnson, M. Karaman, U. Demirci, K. Kaviani, T. H. Lee, and B. T. Khuri-Yakub, “Capacitive micromachined ultrasonic transducers: Next-generation arrays for acoustic imaging?,” IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 49, pp. 1596-1610, Nov. 2002.
16. Y. Roh and B. T. Khuri-Yakub, “Finite element analysis of underwater capacitor micromachined ultrasonic transducers,” IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 49, pp. 293-298, Mar. 2002.
17. O. Oralkan, A. S. Ergun, C. Ching-Hsiang, J. A. Johnson, M. Karaman, T. H. Lee, and B. T. Khuri-Yakub, “Volumetric ultrasound imaging using 2-D CMUT arrays,” IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 50, pp. 1581-1594, Nov. 2003.
18. U. Demirci, O. Oralkan, J. A. Johnson, A. S. Ergun, M. Karaman, and B. T. Khuri-Yakub, “Capacitive micromachined ultrasonic transducer arrays for medical imaging: Experimental results,” in Proc. IEEE Ultrason. Symp., 2001, pp. 957-960.
19. U. Demirci, A. S. Ergun, O. Oralkan, M. Karaman, and B. T. Khuri-Yakub, “Forward-viewing CMUT arrays for medical imaging,” IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 51, pp. 887-895, Jul. 2004.
20. B. Bayram, G. G. Yaralioglu, A. S. Ergun, and B. T. Khuri-Yakub, “Influence of the electrode size and location on the performance of a CMUT,” in Proc. IEEE Ultrason. Symp., 2001, pp. 949-952.
21. H. Yongli, A. S. Ergun, E. Haeggstrom, M. H. Badi, and B. T. Khuri-Yakub, “Fabricating capacitive micromachined ultrasonic transducers with wafer-bonding technology,” J. Microelectromech. Syst., vol. 12, pp. 128-137, 2003.
22. G. G. Yaralioglu, A. S. Ergun, H. Yongli, and B. T. Khuri-Yakub, “Capacitive micromachined ultrasonic transducers for robotic sensing applications,” in Proc. IEEE Conf. Intell. Robots Syst., 2003, pp. 2347-2352.
23. H. Jagannathan, G. G. Yaralioglu, A. S. Ergun, and B. T. Khuri-Yakub, “An implementation of a microfluidic mixer and switch using micromachined acoustic transducers,” in Proc. IEEE Conf. Micro Electro Mechanical Syst., 2003, pp. 104-107.
24. A. Schroder, S. Harasek, M. Kupnik, M. Wiesinger, E. Gornik, E. Benes, and M. Groschl, “A capacitance ultrasonic transducer for high-temperature applications,” IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 51, pp. 896-907, Jul. 2004.
25. A. Lohfink, P.-C. Eccardt, W. Benecke, and H. Meixner, “Derivation of a 1D CMUT model from FEM results for linear and nonlinear equivalent circuit simulations,” in Proc. IEEE Ultrason. Symp., 2003, pp. 465–468.
26. I. Ladabaum, X. C. Jin, and B. T. Khuri-Yakub, “Air coupled through transmission of aluminum and other recent results using MUTs,” in Proc. IEEE Ultrason. Symp., 1997, pp. 975–986.
27. K. Niederer, P.-C. Eccardt, H. Meixner, and R. Lerch, “Micro-machined transducer design for minimized generation of surface waves,” in Proc. IEEE Ultrason. Symp., 1999, pp. 1137–1139.
28. A. Ronnekleiv, I. Ladabaum, X. C. Jin, and B. T. Khuri-Yakub, “An improved circuit model of MUTs,” in Proc. IEEE Ultrason. Symp., 1997, pp. 395–399.
29. S. Ballandras, A. Caronti, W. Steichen, M. Wilm, V. Laude, T. Pastureaud, R. Lardat, and W. Daniau, “Simulation of cMUT radiating in water using a mixed finite element/boundary element approach,” in Proc. IEEE Ultrason. Symp., 2002, pp. 1075–1078.
30. K.-Y. Hashimoto, T. Omori, and M. Yamaguchi, “Analysis of SAW excitation and propagation under periodic metallic grating structures,” in Advances in Surface Acoustic Wave Technology, Systems and Applications. C. C. W. Ruppel and T. A. Fjeldly, Eds. vol. 1, Singapore: World Scientific, 2000, pp. 133–182.
31. L. E. Kinsler and A. R. Frey, Fundamentals of Acoustics. New York: Wiley, 1962.
32. K. Bløtekjær, K. A. Ingebrigtsen, and H. Skeie, “Acoustic surface waves in piezoelectric materials with periodic metal strips on the surface,” IEEE Trans. Electron. Devices, pp. 1133–1138, 1973.
33. A. Ronnekleiv, “Noise and element impedance in ultrasonic arrays with small elements,” in Proc. IEEE Ultrason. Symp., 2001, pp. 999–1002.
34. L. A. Segel and G. H. Handelman, Mathematics Applied to Continuum Mechanics. New York: Dover, 1987.
35. American Institute of Physics Handbook. 2nd ed. New York: McGraw-Hill, 1963.