Analytical calculation of collapse voltage of CMUT membrane

Proceedings - IEEE Ultrasonics Symposium

Volumn 1, Issue , 2004, Pages 256-259

  Nikoozadeh, Amin ^a   Bayram, Baris ^a   Yaralioglu, Goksen G ^a   Khuri Yakub, Butrus T ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

Capacitive micromachined ultrasonic transducer; CMUT; Collapse voltage

Indexed keywords

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER; CMUT; COLLAPSE VOLTAGE; MEMBRANE DISPLACEMENT;

ALGORITHMS; APPROXIMATION THEORY; CAPACITORS; ELECTROSTATICS; FINITE ELEMENT METHOD; MICROMACHINING;

ULTRASONIC TRANSDUCERS;

EID: 21644445650     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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2. I. Ladabaum, Xuecheng Jin, H. T. Soh, A. Atalar, and B. T. Khuri-Yakub, "Surface micromachined capacitive ultrasonic transducers," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 45, pp. 678-690, May 1998.
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