Finite element analysis of underwater capacitor micromachined ultrasonic transducers

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 49, Issue 3, 2002, Pages 293-298

  Roh, Yongrae ^a,b   Khuri Yakub, Butrus T ^a,c  

^a Kyungpook National University ^*

^b Kyungpook National University   (South Korea)

^c STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC ARRAYS; ACOUSTIC IMPEDANCE; CAPACITORS; CROSSTALK; EQUIVALENT CIRCUITS; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROMACHINING; ULTRASONIC PROPAGATION;

MICROMACHINED ULTRASONIC TRANSDUCERS (MUT);

ULTRASONIC TRANSDUCERS;

BIOMATERIAL; SILICON DERIVATIVE; SILICON NITRIDE; WATER;

ARTICLE; ARTIFACT; ARTIFICIAL MEMBRANE; CHEMISTRY; COMPARATIVE STUDY; COMPUTER SIMULATION; ECHOGRAPHY; ELECTRIC CAPACITANCE; EQUIPMENT DESIGN; FINITE ELEMENT ANALYSIS; IMPEDANCE; INSTRUMENTATION; METHODOLOGY; MOTION; PRESSURE; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY; THEORETICAL MODEL; TRANSDUCER; ULTRASOUND;

ARTIFACTS; COATED MATERIALS, BIOCOMPATIBLE; COMPUTER SIMULATION; ELECTRIC CAPACITANCE; ELECTRIC IMPEDANCE; EQUIPMENT DESIGN; FINITE ELEMENT ANALYSIS; MEMBRANES, ARTIFICIAL; MODELS, THEORETICAL; MOTION; PRESSURE; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY; SILICON COMPOUNDS; TRANSDUCERS; ULTRASONICS; ULTRASONOGRAPHY; WATER;

EID: 0036488952     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.990939     Document Type: Article

References (14)

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