Study into the shape of oxide lines formed by LAO - Influence of an oxidized material

Surface Science

Volumn 601, Issue 13, 2007, Pages 2876-2880

  Soltys J ^a   Cambel, V ^a   Kudela R ^a   Elias P ^a  

^a INSTITUTE OF ELECTRICAL ENGINEERING   (Slovakia)

Author keywords

AFM lithography; GaAs AlGaAs; Heterostructures; Native oxide

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC CONTACTS; FILM THICKNESS; HETEROJUNCTIONS; OXIDATION;

AFM-LITHOGRAPHY; NATIVE OXIDES;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 34250745658     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2006.12.029     Document Type: Article

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