Nanooxidation of silicon with an atomic force microscope: A pulsed voltage technique

Applied Physics Letters

Volumn 74, Issue 26, 1999, Pages 4049-4051

  Legrand, B ^a   Stievenard, D ^a  

^a INSTITUT D ELECTRONIQUE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000761280     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.123257     Document Type: Article

References (23)

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