Study of tip-induced Ti-film oxidation in atomic force microscopy contact and non-contact mode

Acta Physica Polonica A

Volumn 103, Issue 6, 2003, Pages 553-558

  Soltys J ^a   Cambel, V ^a   Fedor, J ^a  

^a INSTITUTE OF ELECTRICAL ENGINEERING   (Slovakia)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC OXIDATION; ATOMIC FORCE MICROSCOPY; ELECTRIC RESISTANCE; GATES (TRANSISTOR); METALLIC FILMS; NANOTECHNOLOGY; PHOTOLITHOGRAPHY; THIN FILMS;

LOCAL ANODIC OXIDATION (LAO);

TITANIUM OXIDES;

EID: 0042154364     PISSN: 05874246     EISSN: None     Source Type: Journal    
DOI: 10.12693/APhysPolA.103.553     Document Type: Conference Paper

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