Nanoscale oxide structures induced by dynamic electric field on Si with AFM

Applied Surface Science

Volumn 217, Issue 1-4, 2003, Pages 34-38

  Hu, Xiaodong ^a   Guo, Tong ^a   Fu, Xing ^a   Hu, Xiaotang ^a  

^a TIANJIN UNIVERSITY   (China)

Author keywords

AFM; Dynamic electric field; Nanofabrication; Oxide structure

Indexed keywords

ASPECT RATIO; ATOMIC FORCE MICROSCOPY; ELECTRIC FIELDS; ELECTRIC POTENTIAL; LITHOGRAPHY; NANOTECHNOLOGY; SEMICONDUCTING SILICON; SEMICONDUCTOR JUNCTIONS; SURFACES;

OXIDE STRUCTURES;

NANOSTRUCTURED MATERIALS;

EID: 0038539534     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00554-3     Document Type: Article

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