Rare-earth based ultra-thin Lu2O3 for high-k dielectrics

Journal of Physics: Conference Series

Volumn 61, Issue 1, 2007, Pages 229-233

  Darmawan, P ^a   Chia, P S ^a   Lee, P S ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 34247517896     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/61/1/046     Document Type: Article

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