Gadolinium silicate gate dielectric films with sub-1.5 nm equivalent oxide thickness

Applied Physics Letters

Volumn 78, Issue 12, 2001, Pages 1718-1720

  Gupta, J A ^a   Landheer, D ^a   McCaffrey, J P ^a   Sproule, G I ^a  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

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[No Author keywords available]

Indexed keywords

EID: 0035911339     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1356725     Document Type: Article

References (19)

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