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Volumn 9, Issue 6, 2006, Pages

LaAlO3 nanocrystals embedded in amorphous Lu2O 3 high-k gate dielectric for floating gate memory application

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; DIELECTRIC MATERIALS; EMBEDDED SYSTEMS; LANTHANUM COMPOUNDS; LUTETIUM COMPOUNDS; PULSED LASER DEPOSITION; ROBUSTNESS (CONTROL SYSTEMS);

EID: 33645722737     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2193069     Document Type: Article
Times cited : (10)

References (26)
  • 16
    • 84942123474 scopus 로고    scopus 로고
    • J.Greer, A.Korkin, and J.Labanowski, Editors, pp. Elsevier, Amsterdam
    • S. Stemmer and D. G. Schlom, in Nano and Giga Challenges in Microelectronics, J. Greer, A. Korkin, and, J. Labanowski, Editors, pp. 129-150, Elsevier, Amsterdam (2003).
    • (2003) Nano and Giga Challenges in Microelectronics , pp. 129-150
    • Stemmer, S.1    Schlom, D.G.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.