Competition between tensile and compressive stress creation during constrained thin film island coalescence

Journal of Applied Physics

Volumn 101, Issue 3, 2007, Pages

  Bhandari, Abhinav ^a   Sheldon, Brian W ^a   Hearne, Sean J ^b  

^a Brown University   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSIVE STRESS; FILM GROWTH; LITHOGRAPHY; NUCLEATION; RANDOM PROCESSES; TENSILE STRENGTH;

STOCHASTIC NUCLEATION; THIN FILM ISLAND COALESCENCE; VOLMER-WEBER THIN FILM GROWTH;

THIN FILMS;

EID: 33847160724     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2432376     Document Type: Article

References (33)

1. R. Abermann and R. Koch, Thin Solid Films 129, 71 (1985).
2. A. L. Shull and F. Spaepen, J. Appl. Phys. 80, 6243 (1996).
3. J. Floro, S. J. Hearne, J. A. Hunter, P. Kotula, E. Chason, S. C. Seel, and C. V. Thompson, J. Appl. Phys. 89, 4886 (2001).
4. R. C. Cammarata, T. M. Trimble, and D. J. Sorlovitz, J. Mater. Res. 15, 2468 (2000).
5. C. Friesen and C. V. Thompson, Phys. Rev. Lett. 89, 126103 (2002).
6. R. W. Hoffman, Phys. Thin Films 3, 211 (1966).
7. L. B. Freund and E. Chason, J. Appl. Phys. 89, 4866 (2001).
8. W. D. Nix and B. M. Clemens, J. Mater. Res. 14, 3467 (1999).
9. S. Nijhawan, J. Rankin, B. L. Walden, and B. W. Sheldon, Mater. Res. Soc. Symp. Proc. 505, 415 (1998).
10. S. C. Seel, C. V. Thompson, S. J. Hearne, and J. A. Floro, J. Appl. Phys. 88, 7079 (2000).
11. A. Rajamani, B. W. Sheldon, S. Nijhawan, J. Rankin, A. F. Schwartman, L. Riester, and B. L. Walden, J. Appl. Phys. 96, 3531 (2004).
12. A. Rajamani, B. W. Sheldon, E. Chason, and A. F. Bower, Appl. Phys. Lett. 81, 1204 (2002).
13. S. J. Hearne, S. C. Seel, J. A. Floro, C. W. Dyck, W. Fan, and S. R. J. Breuck, J. Appl. Phys. 97, 083530 (2005).
14. B. W. Sheldon, K. H. A. Lau, and A. Rajamani, J. Appl. Phys. 97, 014901 (2001).
15. R. Abermann, R. Kramer, and J. Maser, Thin Solid Films 52, 215 (1978).
16. R. Abermann, Vacuum 41, 1282 (1990).
17. R. Koch, D. Winau, A. Fuhrmann, and K. H. Rieder, Phys. Rev. B 44, 3369 (1991).
18. E. Chason, B. W. Sheldon, L. B. Freund, J. A. Floro, and S. J. Hearne, Phys. Rev. Lett. 88, 156103 (2002).
19. C. Friesen and C. V. Thompson, Phys. Rev. Lett. 93, 056104 (2004).
20. F. Spaepen, Acta Mater. 48, 31 (2000).
21. B. W. Sheldon, A. Ditkowski, R. Beresford, E. Chason, and J. Rankin, J. Appl. Phys. 94, 948 (2003).
22. B. W. Sheldon, A. Rajamani, A. Bhandari, E. Chason, S. K. Hong, and R. Beresford, J. Appl. Phys. 98, 043509 (2005).
23. S. J. Hearne and J. A. Floro, J. Appl. Phys. 97, 014901 (2005).
24. J. A. Floro, E. Chason, and S. R. Lee, Mater. Res. Soc. Symp. Proc. 405, 381 (1996).
25. L. B. Freund, J. A. Floro, and E. Chason, Appl. Phys. Lett. 74, 1987 (1999).
26. C. Pao, E. B. Webb, and D. Srolovitz (unpublished).
27. J. M. Chambers, W. S. Cleveland, B. Kleiner, and P. A. Tukey, Graphical Methods for Data Analysis (Duxbury, Boston, 1983), p. 94.
28. A. Rajamani, R. Beresford, and B. W. Sheldon, Appl. Phys. Lett. 79, 3776 (2001).
29. G. I. Barenblatt, Prikl. Mat. Mekh. 23, 434 (1959).
30. D. S. Dudgale, J. Mech. Phys. Solids 8, 100 (1960).
31. B. W. Sheldon, A. Bhandari, and A. F. Bower (unpublished).
32. S. J. Hearne, J. A. Floro, M. A. Rodriguez, R. T. Tissot, C. S. Fraze, L. Brewer, P. Hlava, and S. Foiles, J. Appl. Phys. 99, 053517 (2006).
33. J. A. Rudd, D. Josell, F. Spaepen, and A. L. Greer, J. Mater. Res. 8, 112 (1993).