Intrinsic tensile stress and grain boundary formation during Volmer-Weber film growth

Applied Physics Letters

Volumn 81, Issue 7, 2002, Pages 1204-1206

  Rajamani, Ashok ^a   Sheldon, Brian W ^a   Chason, Eric ^a   Bower, Allan F ^a  

^a Brown University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COALESCENCE STRESS; EXPERIMENTAL OBSERVATION; FINITE ELEMENT CALCULATIONS; GROWTH PROCESS; POLYCRYSTALLINE FILM; STRESS EVOLUTION; VOLMER-WEBER FILM GROWTH;

COALESCENCE; GRAIN BOUNDARIES; GRAIN GROWTH; TENSILE STRESS;

FILM GROWTH;

EID: 79956013395     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1494459     Document Type: Article

References (14)

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