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Journal of Materials Research

Volumn 15, Issue 11, 2000, Pages 2468-2474

Surface stress model for intrinsic stresses in thin films

(3) Cammarata, R C a,b Trimble, T M a,b Srolovitz, D J c

a Departments of Orthopaedic Surgery (United States)

b UNIVERSITY OF MARYLAND (United States)

c Princeton University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COALESCENCE; COMPRESSIVE STRESS; DIELECTRIC MATERIALS; FILM GROWTH; GRAIN BOUNDARIES; GRAIN GROWTH; INTERFACIAL ENERGY; MATHEMATICAL MODELS; RESIDUAL STRESSES; SUBSTRATES;

SURFACE STRESS MODEL;

THIN FILMS;

EID: 0034333905 PISSN: 08842914 EISSN: None Source Type: Journal
DOI: 10.1557/JMR.2000.0354 Document Type: Article

Times cited : (214)

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