Controllable 6H-SiC to 4H-SiC polytype transformation during PVT growth

Journal of Crystal Growth

Volumn 299, Issue 1, 2007, Pages 70-76

  Tupitsyn, E Y ^a   Arulchakkaravarthi, A ^a   Drachev, R V ^a   Sudarshan, T S ^a  

^a University of South Carolina   (United States)

Author keywords

A1. Computer simulation; A1. Polytype transformation; A1. Stoichiometry; A1. Supersaturation; A3. Physical vapor deposition; B2. 4H SIC

Indexed keywords

COMPUTER SIMULATION; GROWTH (MATERIALS); PHYSICAL VAPOR DEPOSITION; STOICHIOMETRY; SUBSTRATES; SUPERSATURATION; THERMODYNAMIC PROPERTIES;

FURNACE DESIGN; MONOCRYSTALS; POLYTYPE TRANSFORMATION; VAPOR STOICHIOMETRY;

SILICON CARBIDE;

EID: 33846591053     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2006.10.258     Document Type: Article

References (34)

1. Singh R. Microelectron. Reliab. 46 (2006) 713
2. Ohtani N., Katsuno M., Tsuge H., Fujimoto T., Nakabayashi M., Yashiro H., Sawamura M., Aigo T., and Hoshino T. Microelectron. Eng. 83 (2006) 142
3. Rost H.-J., Doerschel J., Schulz D., Siche D., and Wollweber J. Mater. Sci. Forum 389-393 (2002) 67
4. Hofmann D., Schmitt E., Bickermann M., Kölbl M., Wellman P., and Winnacker A. Mater. Sci. Eng. B 61-62 (1999) 48
5. Yakimova R., Iakimov T., Syväjari M., Jacobsson H., Råback P., Vehanen A., and Janzén E. MRS Symp. Proc. 572 (1999) 265
6. Sanchez E., Kopec A., Poplawski S., Ware R., Holmes S., Wang S., and Timmerman A. Mater. Sci. Forum 389-393 (2002) 71
7. Bechstedt F., and Kackel P. J. Phys. Rev. Lett. 75 11 (1995) 2180
8. Polyakov V.M., and Schwierz F. J. Appl. Phys. 98 (2005) 023709
9. Lebedev A.A. Semicond. Sci. Technol. 21 (2006) R-17
10. Yoo W., Nishino S., and Matsunami H. J. Crystal Growth 99 (1990) 278
11. Freudenberg A., Wollweber J., Nitschke R., Alex V., and Doerschel J. J. Crystal Growth 275 (2005) e467
12. Nishiguchi T., Shimizu T., Sasaki M., Ohshima S., and Nishino S. Mater. Sci. Forum 353-356 (2001) 69
13. Yakimova R., Syvajarvi M., Iakimov T., Jacobson H., Raback R., Vehanen A., and Janzen E. J. Crystal Growth 217 (2000) 255
14. Stein R.A., and Lanig P. J. Crystal Growth 131 (1993) 71
15. Stein R.A., Lanig P., and Leibenzder S. Mater. Sci. Eng. B 11 (1992) 69
16. Kanaya M., Takahashi J., Fujiwara Yu., and Moritani A. Appl. Phys. Lett. 58 (1991) 56
17. Tairov Yu.M., and Tsvetkov V.F. Progr. Crystal Growth Charact. 4 (1983) 111
18. Fissel A. J. Crystal Growth 212 (2000) 438
19. Rost H., Doerschel J., Irmscher K., Roßberg M., Shulz D., and Siche D. J. Crystal Growth 275 (2005) 451
20. Rost H., Schmidbauer M., Siche D., and Fornari R. J. Crystal Growth 290 (2006) 137
21. Siche D., Albrecht M., Doerschel J., Irmscher K., Rost H., Roßberg M., and Schulz D. Mater. Sci. Forum 483-485 (2005) 39
22. Tairov Yu.M. Mater. Sci. Eng. B 29 (1995) 83
23. Tairov Yu.M., and Tsvetkov V.F. J. Crystal Growth 52 (1981) 146
24. Wang S., Sanchez E., Kopec A., Zhang M., and Hernandez O. Mater. Sci. Forum 457-460 (2004) 51
25. Straubinger T., Bickermaann M., Hofmann D., Weingartner R., Wellmann P., and Winnacker A. Mater. Sci. Forum 353-356 (2001) 25
26. Anikin M., Pernot E., Pelissier B., Pons M., Pisch A., Bernard C., Billon T., Faure C., Moulin C., and Madar R. Mater. Sci. Forum 353-356 (2001) 21
27. Bondokov R.T., Khlebnikov I.I., Lashkov T., Tupitysn E., Stratiy G., Khlebnikov Y., and Sudarshan T.S. Jpn. J. Appl. Phys. 41 (2002) 7312
28. Shulze N., Barrett D., Weidner M., and Pensl G. Mater. Sci. Forum 338 (2000)
29. Nishiguchi T., Shimizu T., Sasaki M., and Nishino S. Mater. Sci. Forum 353-356 (2001) 69
30. Cherednichenko D., Drachev R., and Sudarshan T. J. Crystal Growth 262 (2004) 175
31. Lilov S.K., Tairov Yu.M., Tsvetkov V.F., and Yudin B.F. J. Crystal Growth 32 (1976) 170
32. Lilov S.K. Mater. Sci. Eng. B 21 (1993) 65
33. Ramm M.S., Mokhov E., Demina S., Ramm M.G., Roenkov A., Vodakov Yu., Segal A., Vorob'ev A., Karpov S., Kulik A., and Makarov Yu. Mater. Sci. Eng. B 61-62 (1999) 107
34. Wellmann P., Herro Z., Winnacker A., Pusche R., Hundhausen M., Masri P., Kulik A., Bogdanov M., Karpov S., Ramm M., and Makarov Yu. J. Crystal Growth 275 (2005) e1807