Applicability of self-consistent global model for characterization of inductively coupled Cl2 plasma

Vacuum

Volumn 81, Issue 5, 2007, Pages 669-675

  Efremov, A M ^a   Kim, Gwan Ha ^b   Kim, Jong Gyu ^b   Bogomolov, A V ^a   Kim, Chang Il ^b  

^a IVANOVO STATE UNIVERSITY OF CHEMISTRY AND TECHNOLOGY   (Russian Federation)

^b Chung Ang University   (South Korea)

Author keywords

Cl2 inductive plasma; Density; Dissociation; Electron temperature; Ionization; Modeling; Rate coefficient

Indexed keywords

APPROXIMATION THEORY; IONIZATION; MATHEMATICAL MODELS; MAXWELL EQUATIONS; PRESSURE EFFECTS;

ELECTRON TEMPERATURE; PLASMA MODELING; RATE COEFFICIENT;

INDUCTIVELY COUPLED PLASMA;

EID: 33845197094     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2006.09.017     Document Type: Article

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