Electron energy distributions in inductively coupled plasma: Comparison of chlorine discharge with argon discharge

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 10, 2002, Pages 6189-6196

  Yonemura, Shigeru ^a   Nanbu, Kenichi ^a   Sakai, Kazuma ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Argon plasma; Chlorine plasma; Electron energy distribution; Inductively coupled plasma; Particle in cell Monte Carlo method

Indexed keywords

ARGON; CHLORINE; COMPUTER SIMULATION; ELECTRIC DISCHARGES; ELECTRON ENERGY LEVELS; MAXWELL EQUATIONS; MONTE CARLO METHODS; NUMERICAL ANALYSIS; TEMPERATURE DISTRIBUTION;

ARGON DISCHARGE; CHLORINE DISCHARGE; ELECTRON ENERGY DISTRIBUTION FUNCTIONS;

INDUCTIVELY COUPLED PLASMA;

EID: 0036818914     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.6189     Document Type: Article

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