Dominance of Cl2+ or Cl+ ions in time-modulated inductively coupled Cl2 plasma investigated with laser-induced fluorescence technique and probe measurements

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 12 B, 2000, Pages 6980-6984

  Kumagai, Shinya ^a   Sasaki, Minoru ^a   Koyanagi, Mitsumasa ^a   Hane, Kazuhiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Chlorine atomic ion; Chlorine molecular ion; Laser induced fluorescence; Metastable chlorine atomic ion; Time modulated plasma

Indexed keywords

CHLORINE; FLUORESCENCE; FREQUENCY MODULATION; LASER APPLICATIONS; MOLECULAR DYNAMICS; MOLECULAR STRUCTURE;

LASER-INDUCED FLUORESCENCE; METASTABLE CHLORINE ATOMIC IONS; TIME-MODULATED PLASMAS;

PLASMA ETCHING;

EID: 0034430495     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.6980     Document Type: Article

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