Diagnostics of inductively coupled chlorine plasmas: Measurement of Cl+2 and Cl+ densities

Journal of Applied Physics

Volumn 88, Issue 5, 2000, Pages 2246-2251

  Malyshev, M V ^a,c   Fuller, N C M ^a,b   Bogart, K H A ^a   Donnelly, V M ^a   Herman, Irving P ^b  

^a LUCENT TECHNOLOGIES   (United States)

^b Columbia University ^*  (United States)

^c MCKINSEY AND COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0345871112     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1288156     Document Type: Article

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