Fabrication process of PZT piezoelectric cantilever unimorphs using surface micromachining

Integrated Ferroelectrics

Volumn 15, Issue 1-4, 1997, Pages 325-332

  Kim, Joon Han ^a   Wang, Lei ^a   Zurn, Shayne M ^a   Li, L I ^a   Yoon, Young Soo ^a   Polla, Dennis L ^a  

^a UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; DEPOSITION; DIELECTRIC FILMS; ENCAPSULATION; LEAD COMPOUNDS; MICROMACHINING; THIN FILMS;

LEAD ZIRCONATE TITANATE; PIEZOELECTRIC CANTILEVER BEAM MICROACCELEROMETERS; SURFACE MICROMACHINING;

PIEZOELECTRIC DEVICES;

EID: 0031377393     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589708015723     Document Type: Article

References (7)

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