Flexural-standing-wave elastic force motor using ZnO and PZT thin film on micromachined silicon membranes for wristwatch applications

Smart Materials and Structures

Volumn 7, Issue 3, 1998, Pages 404-416

  Racine, Georges A ^a   Muralt, Paul ^b   Dubois, Marc A ^b  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b Federal Institute of Technology   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; ELECTRIC WATCHES; LEAD COMPOUNDS; PIEZOELECTRIC MATERIALS; PORTABLE EQUIPMENT; POSITION CONTROL; ROTORS; STATORS; THIN FILM DEVICES; ULTRASONIC DEVICES; ZINC OXIDE;

ELASTIC FORCE MOTORS; INTEGRATED PIEZOELECTRIC STRESS DETECTION; MICROMACHINED SILICON MEMBRANES; ULTRASONIC MOTORS;

ELECTRIC MOTORS;

EID: 0032095983     PISSN: 09641726     EISSN: None     Source Type: Journal    
DOI: 10.1088/0964-1726/7/3/015     Document Type: Article

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