Patterning of functional materials by pulsed laser deposition through nanostencils

NanoSingapore 2006: IEEE Conference on Emerging Technologies - Nanoelectronics - Proceedings

Volumn 2006, Issue , 2006, Pages 283-288

  Cojocaru, Cristian Victor ^a   Harnagea, Catalin ^a   Pignolet, Alain ^a   Rosei, Federico ^a  

^a INRS EMT   (Canada)

Author keywords

Atomic force microscopy; Functional materials; Nanostencils; Pulsed laser deposition; Unconventional patterning approaches

Indexed keywords

LITHOGRAPHY; PULSED LASER DEPOSITION; SIEVES; SUBSTRATES; SURFACE PHENOMENA; ULTRAHIGH VACUUM;

FUNCTIONAL MATERIALS; NANOSTENCILS; RESIST BASED LITHOGRAPHY; UNCONVENTIONAL PATTERNING;

NANOSTRUCTURED MATERIALS;

EID: 33750840528     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NANOEL.2006.1609730     Document Type: Conference Paper

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