Exploring microstencils for sub-micron patterning using pulsed laser deposition

Applied Physics A: Materials Science and Processing

Volumn 79, Issue 4-6, 2004, Pages 743-745

  Vroegindeweij, F ^a   Speets, E A ^a   Steen, J A J ^b   Brugger, J ^b   Blank, D H A ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

EVAPORATION; GOLD; NICKEL; PHOTORESISTS; SELF ASSEMBLY; STRONTIUM COMPOUNDS; SUBSTRATES;

GOLD-ETCH SOLUTIONS; MICROSTENCILS; SELF-ASSEMBLED MONOLAYERS (SAMS); THERMAL EVAPORATION;

PULSED LASER DEPOSITION;

EID: 4344709532     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00339-004-2749-0     Document Type: Conference Paper

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