Control of the plasma chemistry of a pulsed inductively coupled methane plasma

Plasma Sources Science and Technology

Volumn 14, Issue 3, 2005, Pages 543-548

  Bauer, Martin ^a   Schwarz Selinger, Thomas ^a   Kang, Hyungdong ^a   Von Keudell, Achim ^b  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

^b RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DISSOCIATION; ELECTRODES; ELECTRONS; MASS SPECTROMETRY; METHANE; PHASE COMPOSITION; PLASMA DIAGNOSTICS; REACTION KINETICS;

ELECTRON TEMPERATURE; ELECTRON-INDUCED DISSOCIATION; PLASMA CHEMISTRY; PULSED PLASMA;

INDUCTIVELY COUPLED PLASMA;

EID: 23844510477     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/14/3/017     Document Type: Article

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