Mechanic study of copper deposition onto gold surfaces by scaling and spectral analysis of in situ atomic force microscopic images

Journal of the Electrochemical Society

Volumn 143, Issue 10, 1996, Pages 3122-3132

  Schmidt, Wolfgang U ^a,c   Alkire, Richard C ^a   Gewirth, Andrew A ^b  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b University of Illinois at Urbana Champaign   (United States)

^c BP EXPLORATION   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COPPER; DIFFUSION; GOLD; MICROELECTRONICS; MORPHOLOGY; SOLUTIONS; SPECTROSCOPY; SURFACE ROUGHNESS; SURFACE TREATMENT;

BENZOTRIAZOLE; COPPER DEPOSITION; ELECTROLYTIC SOLUTIONS; GOLD SURFACES; SCALING ANALYSIS;

ELECTRODEPOSITION;

EID: 0030263102     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1837174     Document Type: Article

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