Application of fourier optics for detecting deflections of infrared-sensing microcantilever arrays

Microscale Thermophysical Engineering

Volumn 3, Issue 4, 1999, Pages 245-251

  Zhao, V ^a   Mao, M ^a   Majumdar, A ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033235188     PISSN: 10893954     EISSN: 10893954     Source Type: Journal    
DOI: 10.1080/108939599199666     Document Type: Article

References (4)

1. T. Perazzo, M. Mao, O. Kwon, and A. Majumdar, Appl. Phy. Lett., vol. 74. p. 3567. 1999.
2. M. Mao, T. Perazzo, O. Kwon, and A. Majumdar. Proc. IEEE MEMS Conf, Orlando. FL. pp. 100-105, 17-21 January 1991.
3. S. Manalis, S. C. Minne, A. Atalar, and C. F. Quate, Appl. Phys. Lett., vol. 69. p. 3944. 1996.
4. X. Wu, S. Fu, L. Pang. Society of Photo Instrumentation Engineers (SPIE), vol. 2921, p. 72, 1996.